A Practical Guide to Optical Metrology for Thin Films - download pdf or read online

By Michael Quinten

ISBN-10: 3527411674

ISBN-13: 9783527411672

ISBN-10: 3527664343

ISBN-13: 9783527664344

A one-stop, concise advisor on choosing and measuring skinny movie thickness by way of optical methods.

This functional ebook covers the legislation of electromagnetic radiation and interplay of sunshine with topic, in addition to the idea and perform of thickness size, and smooth functions. In so doing, it indicates the features and possibilities of optical thickness choice and discusses the strengths and weaknesses of size units in addition to their review methods.

Following an creation to the subject, bankruptcy 2 offers the fundamentals of the propagation of sunshine and different electromagnetic radiation in area and subject. the most subject of this ebook, the selection of the thickness of a layer in a layer stack via measuring the spectral reflectance or transmittance, is taken care of within the following 3 chapters. the colour of skinny layers is mentioned in bankruptcy 6. ultimately, in bankruptcy 7, the writer discusses a number of commercial functions of the layer thickness dimension, together with high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, obvious conductive movies, oxides and polymers, skinny movie photovoltaics, and seriously doped silicon.

Aimed at commercial and educational researchers, engineers, builders and brands concerned about all parts of optical layer and skinny optical movie size and metrology, procedure keep watch over, real-time tracking, and applications.

Content:
Chapter 1 advent (pages 1–5):
Chapter 2 Propagation of sunshine and different Electromagnetic Waves (pages 7–57):
Chapter three Spectral Reflectance and Transmittance of a Layer Stack (pages 59–80):
Chapter four The Optical size (pages 81–119):
Chapter five Thin?Film Thickness selection (pages 121–140):
Chapter 6 the colour of skinny movies (pages 141–147):
Chapter 7 purposes (pages 149–185):

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Additional resources for A Practical Guide to Optical Metrology for Thin Films

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Of more practical and technical interest, however, are gratings with a sawtooth profile, also called blazed gratings. Usually, they are ruled into the support by special ruling machines. Nonruled reflection gratings are made as holographic gratings. These three types are discussed in the following sections. 16 shows a schematic drawing of a reflection grating with surface relief profile. The grating consists of grooves of width b and depth d in a bulk nontransparent highly reflective material. The grooves are separated with distance a.

A similar behavior can also be found for titanium nitride TiN. TiN belongs to a larger group of compounds with extreme stability (hardness, chemical inertness, high melting point, and high Young’s modulus) caused by the intricate mixture of covalent bonds and ionic contributions. They result in a ceramic behavior with respect to hardness and inertness, and a metallic behavior with high electrical and thermal conductivity, and free-electron-like optical behavior. In these transition metal nitrides, the d-electrons just below the Fermi surface contribute to the free electron gas.

Then, it might be necessary to consider anisotropy in the linear term. For simplicity, we assume optical isotropy for which the susceptibility simply is a scalar quantity. The linearity means that charges displaced by the applied field from their position of equilibrium are retreated by forces that are proportional to the distance from the position of equilibrium. In consequence, a charge qj with mass mj executes forced oscillations in a time periodic electric field E ¼ E0 ðrÞexpðÀivtÞ. This is the harmonic oscillator model because the retreating force is linear in the displacement rj.

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A Practical Guide to Optical Metrology for Thin Films by Michael Quinten


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